P. Roura N. A. / Matsuda / Furukawa / J. Costa N. A. / /
Currency
pence / USD / / /
Facility
American Institute of Physics / American Institute of Physics Downloaded¬26¬Apr¬2010¬to¬84.88.138.106.¬Redistribution¬subject¬to¬AIP¬license¬or¬copyright;¬see¬http /
IndustryTerm
gas dependent / gas molecules j51 / microscopic gas variables / gas molecules / kinetic energy / exponential law / Gas collisions / gas pressure / given gas / inert gas species / gas variable / greater energy / plasma-enhanced chemical vapor deposition / monoatomic gas / energy / gas family ~monoor / /
Organization
American Institute of Physics / Universitat de Girona / Universitat de Barcelona / /
Person
H. Hashimoto / H. Ono / F. W. Ping / H. Nozawa / /