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Semiconductor device fabrication / Thin film deposition / Silicon on insulator / Epitaxy / Thermal oxidation / Thermal properties of nanostructures / Materials science / Microtechnology / Electronics


Photon Factory Activity Report 2004 #22 Part BSurface and Interface 4C, 15C, 18B/2004G059 Ordered Structure in the Thermal Oxide Layer
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Document Date: 2010-01-05 10:31:04

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City

Osaka / /

Country

Japan / /

/

Facility

Fukui University of Technology / Photon Factory / /

Organization

Osaka Univ. / Fukui University / Graduate School / Faculty of Engineering / /

Person

Si / /

Technology

radiation / x-ray / /

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