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Electronics manufacturing / Packaging / Microtechnology / Semiconductor device fabrication / Wafer bonding / SUSS MicroTec / Wafer / Microelectromechanical systems / Acoustic microscopy / Silicon on insulator / Eutectic bonding / Capacitive micromachined ultrasonic transducers


Imaging Bonded Wafer Defects for 3-D A practical, acoustic imaging technique is applied to bonded wafer pairs to image interface defects and wafer scratches in various materials. he range of products whose fabrication
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Document Date: 2016-07-20 11:09:32


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File Size: 1,47 MB

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