J. L. Mergenthaler A. E. / JPL Micro-Devices Laboratory / Jet Propulsion Laboratory / BCO Technologies / R. Swinbank / Henry G. LeDuc Jet Propulsion Laboratory / Kerr Corporation / /
Currency
USD / / /
Facility
Jet Propulsion Laboratory / JPL Micro-Devices Laboratory / California Institute of Technology / /
IndustryTerm
low energy oxygen plasma / suspended metal beam leads / mixer chip / mixer device / mixer devices / diagnostic chip / carrier wafer / Free standing metal beams / device fabrication technology / receiver devices / clear carrier wafer / Potential applications / thin quartz devices / actual mixer device / chemical processes / back-side device / device processing / thin mixer chips / metal beam leads / e-beam / device applications / functional devices / metal films / diagnostic chips / possible future satellite mission / trilayer devices / test chip / gas monomers / individual mixer chips / /
Organization
California Institute of Technology / American Vacuum Society / U.S. Securities and Exchange Commission / UARS MLS / African Union / National Aeronautics and Space Administration / Bank of England / Rice and Jonas Zmuidzinas Department of Physics / /
Person
Karen A. Lee / Chris Ramsey / Jonas Zmuidzinas / Bruce Bumble / /
Fabrication of wide-IF 200– 300 GHz superconductor–insulator–superconductor mixers with suspended metal beam leads formed on silicon-on-insulator Anupama B. Kaul,a) Bruce Bumble, Karen A. Lee, and Henry G. LeDuc Je