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LOW -VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISM 1 1
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Document Date: 2003-11-07 11:50:11

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File Size: 1,10 MB

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City

Las Vegas / /

Company

Microsoft / /

Country

United States / /

Facility

University of Washington / /

IndustryTerm

energy loss / actuator technologies / manufacturing / imaging / stored potential energy / drive-electronics / potential energy / energy / /

OperatingSystem

L3 / /

Organization

2Michael J. Sinclair and 1Karl F. Böhringer Electrical Engineering Department / University of Washington / Seattle / /

Person

B. McCarthy / V / Y. C. Lee / V / /

Position

designer / /

Technology

MEMS / Optical Fiber / actuator technologies / /

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