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Wafer / Microelectromechanical systems / Electromagnetism / Jenoptik / Fraunhofer Society / Wafer dicing / Semiconductor device fabrication / Materials science / Technology


FRAUNHOFER-INSTITUT FÜR I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B Thermal Laser TLS Applications
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Document Date: 2015-06-10 02:07:13

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City

Erlangen / /

Company

JENOPTIK Automatisierungstechnik GmbH / Ge / /

Country

Germany / /

/

Facility

Fraunhofer Institute / /

/

Organization

Institute for Integrated Systems / /

Person

Martin Schellenberger / /

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Technology

Laser / MEMS / No chipping / /

URL

www.iisb.fraunhofer.de / /

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