OP-OUT port Atmosphere High / FR-OUT port Single / OP-OUT port Double / CL-IN port Atmosphere High / CL-OUT port Atmosphere High / port CL-IN / FR-OUT port Atmosphere Sealed Valve / port Atmosphere High / /
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ULVAC TECHNICAL JOURNAL No.76EDevelopment of Large Pendulum Valves “VFR Series” Shinichi Wada*, Seiya Sakoda*, Hidetake Tanaka*, Tatsuya Miura* and Koichi Mizushima* such as reduced particles, reduced vibratio