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Excipients / Silicon dioxide / Photoemission electron microscopy / Silicon monoxide / Diffusion / Silicon on insulator / XANES / Silicon / Chemistry / Microtechnology / Spectroscopy


Photon Factory Activity Report 2007 #25 Part BSurface and Interface 27A/2006G310 Observation of Lateral Diffusion at Si-SiO2 Interface by PEEM using
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Document Date: 2010-01-05 10:34:53


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Elmitech Co. / /

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silicon devices / semiconductor technology / chemical states / peak energy / photon energy dependences / chemical state mapping / photon energy / /

Organization

Toukai-mura / Ayumi NARITA Japan Atomic Energy Agency / /

Technology

Radiation / semiconductor technology / X-ray / /

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