chemical states using photoemission spectroscopy / metal / transition-metal oxides / energy positions / energy resolution / metal-oxidesemiconductor / lower binding energy side / energy / /
Organization
University of Tokyo / Japan Semiconductor Technology Academic Research Center / High-Energy Accelerator Organization / G.L. Liu Department of Applied Chemistry / /
Surface and Interface 2C/2002S2-002 Chemical reaction and metallic cluster formation by annealing-temperature control in ZrO2 gate insulator on Si