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Scanning capacitance microscopy / Characterization / Electron microscope / Scanning probe microscopy / Failure analysis / Transmission electron microscopy / Focused ion beam / Scanning electron microscope / Energy-dispersive X-ray spectroscopy / Scientific method / Science / Electron microscopy


FRAUNHOFER-INSTITUT FÜR I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B FAILURE ANALYSIS AND
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Document Date: 2015-06-09 04:45:02


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Company

Device Technology IISB Schottkystrasse 10 91058 Erlangen / /

Country

Germany / /

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Facility

Fraunhofer Institute / /

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IndustryTerm

metal linesvv / metal connections / /

Organization

Fraunhofer Institute for Integrated Systems / /

Person

Mathias Rommel / Ray Spectroscopy / /

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Technology

spectroscopy / laser / Microwave / dielectric / /

URL

www.iisb.fraunhofer.de / /

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