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Ultra-high-purity steam for oxidation and annealing
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1	Advances in Remote Plasma Sources for Cleaning 300 mm and Flat Panel CVD Systems Add to Reading List Source URL: www.mksinst.com Language: English - Date: 2008-11-17 11:26:52 Materials science Technology Plasma etching Plasma Chemical vapor deposition Etching Sputtering Ion source Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Plasma processing Chemistry
2	Levitech BV sells two Levitrack® ALD Systems to a major Japanese multinational for the manufacturing of high-performance solar cells ALMERE, The Netherlands – January 22, 2015 – Levitech BV, a leading supplier of ad Add to Reading List Source URL: www.levitech.nl Language: English - Date: 2015-01-22 10:32:58 Thin film deposition Atomic layer deposition Energy conversion Solar cell Rapid thermal processing Amorphous silicon Ultra-high-purity steam for oxidation and annealing Energy Technology Semiconductor device fabrication
3	High Throughput ALD of Al2O3 films for Surface Passivation of Silicon Solar Cells V.I. Kuznetsov, E.H.A Granneman, P. Vermont, K. Vanormelingen Levitech BV, Luidsprekerstraat 1, 1322 AW, Almere, The Netherlands Add to Reading List Source URL: www.levitech.nl Language: English - Date: 2010-09-07 07:42:55 Energy conversion Materials science Solar cells Energy harvesting Solar cell Wafer Passivation Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Technology Energy
4	Levitech ready for introduction of Al2O3 atomic layer deposition system For a long time, the solar industry did not dare dream of atomic layer deposition (ALD). Considering the relative slowness of the process, the secto Add to Reading List Source URL: www.levitech.nl Language: English - Date: 2010-09-09 02:35:40 Semiconductor devices Microtechnology Energy conversion Solar cells Wafer Rapid thermal processing Integrated circuit Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Technology Energy
5	Microsoft Word[removed]European Solar Cell maker selects Levitrack ALD system.docx Add to Reading List Source URL: www.levitech.nl Language: English - Date: 2011-05-10 11:17:45 Energy Chemistry Atomic layer deposition Energy conversion Rapid thermal processing Solar cell Layer Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Thin film deposition Technology
6	A303-medea+ (lo1[removed]:45 Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:05 Electronics Rapid thermal processing Annealing Thermal oxidation Wafer Integrated circuit Light-emitting diode Semiconductor fabrication plant Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Microtechnology Technology
7	Minireviews M. Leskel and M. Ritala Electronic Materials Add to Reading List Source URL: files.instrument.com.cn Language: English - Date: 2006-02-16 04:35:52 Manufacturing Technology Atomic layer deposition Ultra-high-purity steam for oxidation and annealing Ion Layer Gas Reaction Thin film deposition Chemistry Semiconductor device fabrication
8	Improved Oxide Growth Rate and Uniformity through New Steam Delivery Method Add to Reading List Source URL: www.rasirc.com Language: English - Date: 2007-01-22 11:24:28 Silicon Thermal oxidation Deal–Grove model Oxygen Psychrometrics Ultra-high-purity steam for oxidation and annealing Oxide Water vapor Properties of water Chemistry Matter Semiconductor device fabrication
9	Microsoft Word - Solar Cell Paper Rev 10 Add to Reading List Source URL: www.rasirc.com Language: English - Date: 2008-10-06 00:19:40 Energy conversion Solar cells Semiconductor device fabrication Thin films Ultraviolet radiation Ultra-high-purity steam for oxidation and annealing Amorphous silicon Passivation Solar energy Chemistry Energy Technology
10	Improved Oxide Growth Rate and Uniformity through New Steam Delivery Method Add to Reading List Source URL: www.rasirc.com Language: English - Date: 2008-01-26 11:30:52 Silicon Thermal oxidation Ceramic materials Oxygen Solar cells Deal–Grove model Oxide Silicon dioxide Ultra-high-purity steam for oxidation and annealing Chemistry Matter Semiconductor device fabrication